1200C Max. PECVD Tube Furnace System for SiOx, SiNx, SiOxNy and Amorphous silico

TCH-PECVD-12I-3Z/G is a CE certified compact PE-CVD (Plasma Enhanced Chemical Vapor Deposition) tube furnace system, which consists of 500W RF plasma source,split tube furnace, 3 channels precision mass flow meter with gas mixing tank, and high-quality mechanical pump. The PE-CVD furnace is an ideal and affordable tool to deposit thin films or grow nanowire from a gas state (vapor) to a solid state, and benefits: Lower temperature processing compared to conventional CVD. Film stress can be controlled by high/low frequency mixing techniques. Control over stoichiometry via process conditions. Offers a wide range of material deposition, including SiOx, SiNx, SiOxNy and Amorphous silicon (a-Si:H) deposition. Specification of the 1200C Max. PECVD Tube Furnace System Split Tube furnace 1200oC Max. working temperature for < 60 minutes 1100oC Max for continuous heating 30 segments programmable precision digital temperature controller 440 mm length single heating zone and 150 mm length constant temperate zone High purity quartz tube optional from ( click optional bar to choose ) One pair of vacuum sealed flange with valves 2"OD x 1.7"ID x 48" Length 3.14"OD x 2.83"ID x 48'' Length Input power: 208 – 240V AC input, single phase at max. 4KW Two zones split furnace is optional at extra cost Plasma RF Power Supply Output Power: 5 -500W adjustable with ± 1% stability RF frequency: 13.56 MHz ±0.005% stability Reflection Power: 200W max. Matching: Automatic RF Output Port: 50 Ω, N-type, female Noise: <50 dB. Cooling: Air cooling. Power: 208-240VAC, 50/60Hz Note: This RF power supply can accept 50 - 80 mm Max. quartz tube by changing flange Anti-corrosive Pressure Gauge (optional) 3.8x10-5 to 1125 Torr measurement range Anti-corrosive, gas-type independent High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection Fast atmospheric detection eliminates waiting time and shortens process cycle Easy to exchange plug & play sensor element Click the picture to view detail spec Vacuum Pump and valve Heavy Duty Rotary Vane Vacuum Pump (7.8 CFM -240 L/m) with Two Stage Exhaust System installed in the bottom case with max. vacuum pressure 10-2 torr. Turbo pump system for high vacuum upto 10-5 torr Mass Flowmeter 3-Channelled Gas Mixing ( customizable) gas flow rate range 0-500sccm 23W per channel AC 220V, 50/60Hz Single phase Temperature Controller MET certified 30 programmable segments for precise control of heating rate, cooling rate and dwell time. Built in PID Auto-Tune function with overheating & broken thermocouple protection. Over temperature protection and alarm allows for operation without attendant(s). Warranty One year limited warranty with lift time support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty)