Small size piezo stage

P63 is a small-volume 1~3 axes piezo nanopositioning stage. It features ultra-precision and very compact. The size of XYZ version is only 30×30×42mm (only 30×30×21mm for X version) and is very easy to integrate into any scanning instrument.

P63 is an ultra-high precision nanopositioning system. It is designed for AFM, SPM, STM and other micro-scanning nano-operations.

Technical data

Type: P63.XYZ7S/P63.XYZ7K

Active axis: XYZ  

Travel range(0~120V): 5.5/axisμm±10%

Travel range(0~150V): 6.8/axisμm±10%

Sensor : SGS

Closed-loop resolution: 0.2/0.1nm

Closed-loop linearity: 0.4%F.S.

Closed-loop repeatability: 0.2%F.S.

Pitch/yaw/roll: <15μrad

Push/pull force capacity: 7/2N

Stiffness: X0.9/Y1/Z1.2N/μm±20%

Unloaded resonant frequency: X0.9/Y0.95/Z1.2kHz±20%

Closed-loop unloaded step time: 1.5/0.3ms±20%

Load capacity: 0.4kg

El. capacitance: 0.8/axisμF±20%

Operating temperature: -20~80℃

Material: Aluminum  

Size(L×W×H): 30×30×42mm

Mass: 160g±5%

Cable length: 1.5m±10mm