multi-source high-vacuum thermal evaporation coating instrument

This equipment is a multi-source high-vacuum thermal evaporation coating instrument. The equipment adopts a front-opening vacuum chamber design. The chamber has a large space and strong expandability, which can meet the evaporation coating of multiple types of large-size samples. The chamber has an upper sample stage inside, and the clamping or clamping type sample mounting parts can be selected according to the user's sample style. The sample table can be rotated, heated and raised and lowered, and all operations are integrated and controlled through the touch screen. The vacuum pump set of the equipment is a two-stage vacuum system, which is composed of a dual stage rotary vane vacuum pump and a turbo molecular pump. It can provide a clean and oil-free high vacuum environment for the vacuum coating test; the vacuum system contains a complete pneumatic valve system, and the user can One-touch operation through the touch screen realizes vacuuming, non-stop load and unload sample, complete shutdown and other operations.