1200℃ three heating zone high vacuum CVD system with 3-channel mass flow meter

1200℃ three heating zone high vacuum CVD systemconsists of a three-heating zone tube furnace, a three-channel mass flow meter and a high vacuum molecular pump set. The three heating zones of the tube furnace are independently temperature controlled by the precision temperature control instrument. By adjusting the temperature of each temperature zone, the tube furnace can form three temperature gradients in the heating zone or form a long constant temperature zone. Each zone can be edited with 30 sections temperature rise and fall program, with overheating and short circuit protection. The flanges on both sides of the furnace tube are equipped with a digital vacuum gauge and a mechanical pressure gauge, which can be used to control the atmosphere in the furnace tube. At the same time, the tube furnace is operated by high-definition true color touch screen, which is easy to use. Even non-professionals can master the use of the instrument after simple training, which can greatly improve your experiment efficiency. The systemis equipped with three-channel mass flowmeter, which has high precision and high reliability. It can accurately mix 1~3 channels of gas. The operation panel adopts digital display, which is intuitive and efficient. If you have special needs, you can contact the technician to customize any number of gas channels. The system is also equipped with a precision molecular pump set, which can achieve a vacuum degree of1.0E-3pa, which can provide users with a purer and more stringent experimental environment than ordinary mechanical pumps. It is suitable for high-temperature sintering, metal annealing, quality inspection, etc. in universities, research institutes, industrial and mining enterprises, especially for CVD experiments that require a variety of gas mixing atmospheres.