plasma enhanced chemical vapor deposition device with roll to roll system

PECVD with roll to roll system is a plasma enhanced chemical vapor deposition device (PECVD) equipped with a roll-to-roll movement system. It is not only used in the continuous heat treatment process of wire rod, such as the preparation of carbon fiber, the modification of alloy and other materials wire rod, but also used for the continuous growth of graphene on the coil. The equipment is composed of five parts: a roll-to-roll movement system, 1200℃2-heating-zone open tube furnace, PE plasma enhancement system, vacuum system and three-way proton flowmeter gas supply system. The whole system can work in the vacuum / atmosphere protection environment. The speed of the winding device can be adjusted from 1 to 400mm / min, and the mechanism adopts feedback adjustment, which can automatically correct the speed deviation and ensure the speed stability of the sample, thus ensuring the accuracy of the experiment..